MEMS Oscillators (microelectromechanical system) can also be known as silicon oscillators. MEMS combine low power consumption with accurate frequency, offering drop-in footprints to standard oscillators. MEMS offer both kHz and MHz oscillators combining wider temperature and tighter stability than conventional oscillators.
These devices offer great resilience against vibration and shock and offer high reliability with respect to temperature variation. MEMS oscillators are also less sensitive to EMI (Electromagnetic interference) which is common in most systems. MEMS are programmed devices so offer a very broad range of frequencies
MEMS devices consist of mechanical elements such as actuators, sensors and electronics devices on a silicon substrate